35

Oxidation-enhanced diffusion of ion-implanted boron in silicon in extrinsic conditions

Year:
1985
Language:
english
File:
PDF, 822 KB
english, 1985
48

Oxidation-enhanced diffusion of ion-implanted boron in heavily phosphorus-doped silicon

Year:
1985
Language:
english
File:
PDF, 611 KB
english, 1985